Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460050 | Topography simulation apparatus, topography simulation method, and topography simulation program | — | 2019-10-29 |
| 9996639 | Topography simulation apparatus, topography simulation method and recording medium | — | 2018-06-12 |
| 8821684 | Substrate plasma processing apparatus and plasma processing method | Akio Ui, Takashi Ichikawa, Hisataka Hayashi, Takeshi Kaminatsui, Shinji Himori +3 more | 2014-09-02 |
| 8548787 | Simulating a chemical reaction phenomenon in a semiconductor process | Akio Ui, Toshiro Takase, Takashi Ichikawa | 2013-10-01 |
| 8252193 | Plasma processing apparatus of substrate and plasma processing method thereof | Akio Ui, Takashi Ichikawa, Hisataka Hayashi, Akihiro Kojima | 2012-08-28 |
| 8209155 | Simulation method and simulation program | Takashi Ichikawa, Toshiro Takase | 2012-06-26 |
| 7942974 | Method of cleaning a film-forming apparatus | Yuusuke Sato, Jun Sonobe, Takamitsu Shigemoto, Takako Kimura | 2011-05-17 |
| 7192626 | Methods for producing silicon nitride films and silicon oxynitride films by thermal chemical vapor deposition | Christian Dussarrat, Jean-Marc Girard, Takako Kimura, Yuusuke Sato | 2007-03-20 |
| 6365231 | Ammonium halide eliminator, chemical vapor deposition system and chemical vapor deposition process | Yuusuke Sato, Takashi Kataoka, Toshimitsu Ohmine | 2002-04-02 |
| 6022806 | Method of forming a film in recess by vapor phase growth | Yuusuke Sato, Toshimitu Ohmine | 2000-02-08 |
| 5926402 | Simulation method with respect to trace object that event occurs in proportion to probability and computer program product for causing computer system to perform the simulation | Shinichi Tatsuta, Yuusuke Sato, Hiroshi Komiyama, Yasuyuki Egashira | 1999-07-20 |