Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11920732 | Use of stable isotopes of CO2 to validate cylinder preparation | Tracey Jacksier, Mani C. Matthew, Richard A. Socki, Megumi ISAJI, James McHale | 2024-03-05 |
| 9683288 | Method of manufacturing semiconductor device and method of cleaning processing vessel | Kenji Kameda, Yudai Tadaki | 2017-06-20 |
| 9540727 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Kenji Kameda, Yudai Tadaki | 2017-01-10 |
| 9012331 | Etching method and non-transitory storage medium | Shuji Moriya, Atsushi Ando, Christopher Turpin | 2015-04-21 |
| 8679259 | Substrate processing apparatus, method of manufacturing semiconductor device and method of cleaning processing vessel | Kenji Kameda, Yudai Tadaki | 2014-03-25 |
| 8119853 | Low pressure acetylene storage | Shih-Wen Huang | 2012-02-21 |
| 7942974 | Method of cleaning a film-forming apparatus | Naoki Tamaoki, Yuusuke Sato, Takamitsu Shigemoto, Takako Kimura | 2011-05-17 |