Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9683288 | Method of manufacturing semiconductor device and method of cleaning processing vessel | Kenji Kameda, Jun Sonobe | 2017-06-20 |
| 9540727 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Kenji Kameda, Jun Sonobe | 2017-01-10 |
| 8679259 | Substrate processing apparatus, method of manufacturing semiconductor device and method of cleaning processing vessel | Kenji Kameda, Jun Sonobe | 2014-03-25 |
| 8308871 | Thermal cleaning gas production and supply system | — | 2012-11-13 |