Issued Patents All Time
Showing 1–25 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11761075 | Substrate cleaning apparatus | Yukimasa Saito, Toshiki HINATA, Kazuya Dobashi, Kyoko Ikeda | 2023-09-19 |
| 10786837 | Method for cleaning chamber of substrate processing apparatus | Yukimasa Saito, Toshiki HINATA, Kazuya Dobashi, Kyoko Ikeda | 2020-09-29 |
| 10312101 | Substrate processing method and substrate processing apparatus | Masahiko Tomita | 2019-06-04 |
| 9691630 | Etching method | Nobuhiro Takahashi, Tetsuro Takahashi, Masashi Matsumoto, Junichiro MATSUNAGA | 2017-06-27 |
| 9435470 | Pipe joint | Tsuneyuki Okabe, Kenichi Sato, Tomohiro Nakata, Tsutomu Shinohara, Michio Yamaji | 2016-09-06 |
| 9371946 | Pipe joint | Tsuneyuki Okabe, Kenichi Sato, Tomohiro Nakata, Tsutomu Shinohara, Michio Yamaji | 2016-06-21 |
| 9236272 | Etching apparatus and etching method | — | 2016-01-12 |
| 9150965 | Processing apparatus | Toyohiko Shindo, Noboru Tamura | 2015-10-06 |
| 9026011 | Image forming apparatus | Kenta Kubo, Juun Horie, Tomoaki Miyazawa, Hirokazu Usami, Tomohito Ishida +2 more | 2015-05-05 |
| 9012331 | Etching method and non-transitory storage medium | Atsushi Ando, Jun Sonobe, Christopher Turpin | 2015-04-21 |
| 8893743 | Flow rate controller and processing apparatus | Tsuneyuki Okabe, Kazushige Matsuno | 2014-11-25 |
| 8434522 | Fluid control apparatus | Wataru Okase, Tomohiro Nakata, Tsutomu Shinohara, Michio Yamaji | 2013-05-07 |
| 8381755 | Pressure type flow rate control reference and corrosion resistant pressure type flow rate controller used for the same | Wataru Okase, Tsutomu Shinohara, Nobukazu Ikeda, Michio Yamaji, Yasutaka Hayashi +2 more | 2013-02-26 |
| 8219329 | Thermal type mass flow meter, and thermal type mass flow control device | Hiroyuki Ebi, Tetsuo Shimizu, Hitoshi Kitagawa, Tsuneyuki Okabe | 2012-07-10 |
| 8210022 | Pressure type flow rate control reference and corrosion resistant pressure type flow rate controller used for the same | Wataru Okase, Tsutomu Shinohara, Nobukazu Ikeda, Michio Yamaji, Yasutaka Hayashi +2 more | 2012-07-03 |
| 8104516 | Gas supply unit and gas supply system | Hideki Nagaoka, Tsuneyuki Okabe, Hiroshi Itafuji, Hiroki Doi, Minoru Ito | 2012-01-31 |
| 8019260 | Image forming apparatus | Rie Endo, Katsuhiro Sakaizawa, Norio Takahashi | 2011-09-13 |
| 7962076 | Image forming apparatus | Rie Endo, Katsuhiro Sakaizawa, Norio Takahashi | 2011-06-14 |
| 7862638 | Gas supply system for semiconductor manufacturing apparatus | Ken Nakao | 2011-01-04 |
| 7734205 | Image forming apparatus | Katsuhiro Sakaizawa, Norio Takahashi, Rie Endo | 2010-06-08 |
| 7682843 | Semiconductor fabrication system, and flow rate correction method and program for semiconductor fabrication system | Tsuneyuki Okabe, Hiroyuki Ebi, Tetsuo Shimizu, Hitoshi Kitagawa | 2010-03-23 |
| 7440718 | Developing apparatus featuring image defect supression | Kazunari Hagiwara, Kenya Ogawa, Naoto Kichijima, Yasushi Shimizu, Koichi Okuda | 2008-10-21 |
| 7383003 | Developing apparatus for preventing ghost images and uneven image density | Naoto Kichijima, Koichi Okuda, Yasushi Shimizu, Kenya Ogawa, Kazunari Hagiwara | 2008-06-03 |
| 7379693 | Developing apparatus | Kenya Ogawa, Yasushi Shimizu, Kazunari Hagiwara, Naoto Kichijima, Koichi Okuda | 2008-05-27 |
| 7251441 | Developing apparatus including magnetic field generating means, for use with a developer which includes a magnetic toner component | Kazunari Hagiwara, Kouichi Okuda, Yasushi Shimizu, Kenya Ogawa, Hikaru Osada | 2007-07-31 |