Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10629446 | Substrate treatment method and substrate treatment apparatus | Hiroyuki Takahashi | 2020-04-21 |
| 10622205 | Substrate processing method and substrate processing apparatus | Hiroyuki Takahashi, Tomoaki OGIWARA, Takuya Abe, Jiro Katsuki | 2020-04-14 |
| 10410874 | Plasma processing apparatus and method, and method of manufacturing semiconductor device using the same | Beom Jin Yoo, Sang Ki Nam, Kwang Heo, Jehun Woo, Sang Heon Lee +1 more | 2019-09-10 |
| 10312101 | Substrate processing method and substrate processing apparatus | Shuji Moriya | 2019-06-04 |
| 9984892 | Oxide film removing method, oxide film removing apparatus, contact forming method, and contact forming system | Takashi Kobayashi, Seishi Murakami, Takashi Sakuma, Takamichi Kikuchi, Akitaka Shimizu +2 more | 2018-05-29 |
| 9827067 | Linear member transfer apparatus | Tomokazu Iwasaki, Hideto Onishi, Akihisa Ogawa, Young Chung Kim | 2017-11-28 |
| 9820630 | Leak tester and endoscope reprocessor | — | 2017-11-21 |
| 9027574 | Cleaning/disinfecting apparatus | Aiko Kosugi, Michifumi YOSHIE, Akihisa Ogawa, Yoshitomo Yaguchi | 2015-05-12 |
| 8715425 | Endoscope cleaning/disinfecting apparatus and endoscope cleaning/disinfecting method | Ryuta SEWAKE, Eiri Suzuki, Shinichiro KAWACHI, Naoya Taya | 2014-05-06 |
| 8631684 | Water leakage checking apparatus | Aiko Kosugi, Akihisa Ogawa, Yoshitomo Yaguchi | 2014-01-21 |
| 8267102 | Washing tube and endoscope washing and disinfecting apparatus | Hideto Onishi, Eiri Suzuki, Toshiaki Noguchi, Ryuta SEWAKE, Hitoshi Hasegawa | 2012-09-18 |
| 8183158 | Semiconductor processing apparatus and method for using same | Kota Umezawa, Ryou Son, Toshiharu Nishimura | 2012-05-22 |
| 8176771 | Endoscope washing and disinfecting apparatus and leak detection method performed by the apparatus | Hideto Onishi, Kenichi Kobayashi, Keisuke NOZAKI, Shintaro Suzuki, Naoya Taya +2 more | 2012-05-15 |
| 8080109 | Film formation apparatus and method for using the same | Mitsuhiro Okada, Satoshi Takagi, Ryou Son, Yamato Tonegawa, Toshiharu Nishimura | 2011-12-20 |
| 7981809 | Film formation method and apparatus for semiconductor process | Tetsuya Shibata, Yutaka Takahashi, Kota Umezawa | 2011-07-19 |
| 7354858 | Film formation method and apparatus for semiconductor process | Yutaka Takahashi, Satoshi Takagi | 2008-04-08 |
| 7229917 | Film formation method and apparatus for semiconductor process | Takahito Umehara, Hirotake Fujita, Kazuhide Hasebe | 2007-06-12 |