Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11214864 | Method for reducing metal contamination and film deposition apparatus | — | 2022-01-04 |
| 11075076 | Method for manufacturing a semiconductor device and film deposition apparatus | Masato Koakutsu | 2021-07-27 |
| 10975466 | Method of cleaning exhaust pipe | Masato Koakutsu, Tsubasa WATANABE | 2021-04-13 |
| 10648076 | Cleaning method and film deposition apparatus executing the cleaning method for uniformly cleaning rotary table | Tatsuya Tamura | 2020-05-12 |
| 10344382 | Film forming apparatus | Hideomi HANE, Takehiro Kasama, Tsubasa WATANABE | 2019-07-09 |
| 10151028 | Film deposition apparatus | Takashi Chiba, Masayuki Hasegawa | 2018-12-11 |
| 9388496 | Method for depositing a film on a substrate, and film deposition apparatus | Hideomi HANE | 2016-07-12 |
| 7651733 | Method for forming a vapor phase growth film | Kazuhide Hasebe, Hiroyuki Yamamoto, Masato Kawakami | 2010-01-26 |
| 7229917 | Film formation method and apparatus for semiconductor process | Masahiko Tomita, Hirotake Fujita, Kazuhide Hasebe | 2007-06-12 |
| 7041546 | Film forming method for depositing a plurality of high-k dielectric films | Yuichiro Morozumi, Kazuhide Hasebe, Shigeru Nakajima, Haruhiko Furuya, Dong-Kyun Choi +3 more | 2006-05-09 |