Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347649 | Plasma processing apparatus and lid member | Hiroshi Kondo | 2025-07-01 |
| 12205800 | Plasma processing apparatus and plasma processing method | Taro Ikeda | 2025-01-21 |
| 12165846 | Plasma processing apparatus and plasma processing method | Eiki KAMATA, Taro Ikeda | 2024-12-10 |
| 9136156 | Substrate processing apparatus and film deposition apparatus | Tadashi Enomoto, Mitsuhiro Tachibana, Kentaro Oshimo | 2015-09-15 |
| 9080238 | Raw material supplying device and film forming apparatus | Yu Wamura | 2015-07-14 |
| 8778812 | Apparatus and method of forming thin film including adsorption step and reaction step | Jun Ogawa, Masahiko Kaminishi, Yoshinobu Ise, Yoshitaka Enoki | 2014-07-15 |
| 8586140 | Film formation method for forming hafnium oxide film | — | 2013-11-19 |
| 7368384 | Film formation apparatus and method of using the same | Atsushi Endo, Tomonori Fujiwara, Yuichiro Morozumi, Katsushige Harada, Shigeru Nakajima +2 more | 2008-05-06 |
| 7041546 | Film forming method for depositing a plurality of high-k dielectric films | Yuichiro Morozumi, Kazuhide Hasebe, Shigeru Nakajima, Dong-Kyun Choi, Takahito Umehara +3 more | 2006-05-09 |