Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10472719 | Nozzle and substrate processing apparatus using same | Yu Wamura, Fumiaki Hayase, Kosuke Takahashi, Hiroko Sasaki, Yu Sasaki | 2019-11-12 |
| 10053776 | Method of detoxifying exhaust pipe and film forming apparatus | Yu Wamura, Fumiaki Hayase, Kosuke Takahashi, Yu Sasaki, Hiroko Sasaki | 2018-08-21 |
| 9929008 | Substrate processing method and substrate processing apparatus | Yu Wamura, Fumiaki Hayase, Yu Sasaki, Kosuke Takahashi | 2018-03-27 |
| 9252043 | Film deposition method | Hiroaki Ikegawa, Jun Ogawa | 2016-02-02 |
| 8987147 | Method of depositing a film using a turntable apparatus | Hiroaki Ikegawa, Kosuke Takahashi, Masato Koakutsu, Jun Ogawa | 2015-03-24 |
| 8980371 | Film deposition method | Hiroaki Ikegawa, Kosuke Takahashi, Yu Sasaki, Jun Ogawa | 2015-03-17 |
| 8962495 | Film deposition method | Hiroaki Ikegawa, Yoshinobu Ise, Jun Ogawa | 2015-02-24 |
| 8778812 | Apparatus and method of forming thin film including adsorption step and reaction step | Haruhiko Furuya, Jun Ogawa, Yoshinobu Ise, Yoshitaka Enoki | 2014-07-15 |
| 8354135 | Thermal processing apparatus, method for regulating temperature of thermal processing apparatus, and program | Yuichi Takenaga, Wenling Wang, Tatsuya Yamaguchi | 2013-01-15 |
| 7637268 | Film formation method and apparatus for semiconductor process | Hitoshi Kato, Kazumi Kubo | 2009-12-29 |