Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10472719 | Nozzle and substrate processing apparatus using same | Yu Wamura, Fumiaki Hayase, Masahiko Kaminishi, Kosuke Takahashi, Yu Sasaki | 2019-11-12 |
| 10053776 | Method of detoxifying exhaust pipe and film forming apparatus | Yu Wamura, Fumiaki Hayase, Masahiko Kaminishi, Kosuke Takahashi, Yu Sasaki | 2018-08-21 |
| 9748104 | Method of depositing film | Yu Wamura, Masato Koakutsu | 2017-08-29 |
| 9136133 | Method of depositing film | Kentaro Oshimo, Masato Koakutsu, Hiroaki Ikegawa | 2015-09-15 |
| 8921237 | Method of depositing a film | Kentaro Oshimo, Masato Koakutsu, Hiroaki Ikegawa | 2014-12-30 |
| 6545276 | Near field optical microscope | — | 2003-04-08 |
| 6469288 | Near field optical microscope and probe for near field optical microscope | Yasuo Sasaki | 2002-10-22 |