Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11702739 | Film deposition method and film deposition apparatus | Hiroki Miura | 2023-07-18 |
| 11075076 | Method for manufacturing a semiconductor device and film deposition apparatus | Takahito Umehara | 2021-07-27 |
| 10975466 | Method of cleaning exhaust pipe | Takahito Umehara, Tsubasa WATANABE | 2021-04-13 |
| 10961623 | Film forming method | — | 2021-03-30 |
| 9748104 | Method of depositing film | Hiroko Sasaki, Yu Wamura | 2017-08-29 |
| 9136133 | Method of depositing film | Kentaro Oshimo, Hiroko Sasaki, Hiroaki Ikegawa | 2015-09-15 |
| 8992079 | Temperature measurement apparatus, method of estimating temperature profile, recording medium and heat treatment apparatus | Masayuki Moroi, Hitoshi Kikuchi | 2015-03-31 |
| 8987147 | Method of depositing a film using a turntable apparatus | Hiroaki Ikegawa, Masahiko Kaminishi, Kosuke Takahashi, Jun Ogawa | 2015-03-24 |
| 8921237 | Method of depositing a film | Kentaro Oshimo, Hiroko Sasaki, Hiroaki Ikegawa | 2014-12-30 |