Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334380 | Boat transfer method and heat treatment apparatus | Shingo Hishiya, Volker Hemel, Bernhard Zobel, Sung Duk SON | 2025-06-17 |
| 11171014 | Substrate processing method and substrate processing apparatus | Hideomi HANE, Kentaro Oshimo, Shimon Otsuki, Jun Ogawa, Noriaki Fukiage +2 more | 2021-11-09 |
| 10900121 | Method of manufacturing semiconductor device and apparatus of manufacturing semiconductor device | Noriaki Fukiage, Kentaro Oshimo, Shimon Otsuki, Hideomi HANE, Jun Ogawa | 2021-01-26 |
| 10550467 | Film formation apparatus | Hiroyuki Wada, Katsuyuki Hishiya | 2020-02-04 |
| 10550470 | Film forming apparatus and operation method of film forming apparatus | Hideomi HANE, Kentaro Oshimo, Shimon Otsuki, Takeshi Oyama, Jun Ogawa | 2020-02-04 |
| 10519550 | Film formation apparatus | Hiroyuki Wada, Katsuyuki Hishiya | 2019-12-31 |
| 10438791 | Film forming method, film forming apparatus, and storage medium | Hideomi HANE, Kentaro Oshimo, Shimon Otsuki, Jun Ogawa, Noriaki Fukiage +2 more | 2019-10-08 |
| 10297443 | Semiconductor device manufacturing method and semiconductor device manufacturing system | Jun Ogawa | 2019-05-21 |
| 9640448 | Film forming method, film forming apparatus, and storage medium | Hiromi Shima, Yusuke TACHINO | 2017-05-02 |
| 9252043 | Film deposition method | Masahiko Kaminishi, Jun Ogawa | 2016-02-02 |
| 9136133 | Method of depositing film | Kentaro Oshimo, Masato Koakutsu, Hiroko Sasaki | 2015-09-15 |
| 8987147 | Method of depositing a film using a turntable apparatus | Masahiko Kaminishi, Kosuke Takahashi, Masato Koakutsu, Jun Ogawa | 2015-03-24 |
| 8980371 | Film deposition method | Masahiko Kaminishi, Kosuke Takahashi, Yu Sasaki, Jun Ogawa | 2015-03-17 |
| 8962495 | Film deposition method | Masahiko Kaminishi, Yoshinobu Ise, Jun Ogawa | 2015-02-24 |
| 8921237 | Method of depositing a film | Kentaro Oshimo, Masato Koakutsu, Hiroko Sasaki | 2014-12-30 |
| 8895456 | Method of depositing a film | Mitsuhiro Tachibana, Yu Wamura, Muneyuki OTANI, Jun Ogawa, Kosuke Takahashi | 2014-11-25 |
| 7084023 | Method of manufacturing semiconductor device, film-forming apparatus, and storage medium | Shigeru Nakajima, Dong-Kyun Choi, Tomonori Fujiwara, Genji Nakamura | 2006-08-01 |
| 5500388 | Heat treatment process for wafers | Reiji Niino, Tomoyuki Ohbu, Ken Nakao, Yoshiyuki Fujita, Tsutomu Haraoka +3 more | 1996-03-19 |