Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11970768 | Film forming method and film forming apparatus | Hideomi HANE, Shimon Otsuki, Ren MUKOUYAMA, Jun Ogawa, Noriaki Fukiage | 2024-04-30 |
| 11473194 | Cleaning method of deposition apparatus | Jun Ogawa, Hiroyuki Wada, Akihiro Kuribayashi | 2022-10-18 |
| 11414753 | Processing method | Hideomi HANE, Kentaro Oshimo, Yusuke Suzuki, Jun Ogawa | 2022-08-16 |
| 11201053 | Film forming method and film forming apparatus | Noriaki Fukiage, Takayuki Karakawa, Toyohiro KAMADA, Akihiro Kuribayashi, Jun Ogawa +3 more | 2021-12-14 |
| 11171014 | Substrate processing method and substrate processing apparatus | Hideomi HANE, Kentaro Oshimo, Shimon Otsuki, Jun Ogawa, Noriaki Fukiage +2 more | 2021-11-09 |
| 10714332 | Film forming method and film forming apparatus | Noriaki Fukiage, Takayuki Karakawa, Toyohiro KAMADA, Akihiro Kuribayashi, Jun Ogawa +3 more | 2020-07-14 |
| 10573512 | Film forming method | Noriaki Fukiage | 2020-02-25 |
| 10550470 | Film forming apparatus and operation method of film forming apparatus | Hideomi HANE, Kentaro Oshimo, Shimon Otsuki, Hiroaki Ikegawa, Jun Ogawa | 2020-02-04 |
| 10438791 | Film forming method, film forming apparatus, and storage medium | Hideomi HANE, Kentaro Oshimo, Shimon Otsuki, Jun Ogawa, Noriaki Fukiage +2 more | 2019-10-08 |
| 10151029 | Silicon nitride film forming method and silicon nitride film forming apparatus | Noriaki Fukiage, Jun Ogawa | 2018-12-11 |
| 9922820 | Film forming method and film forming apparatus | Noriaki Fukiage, Takayuki Karakawa, Toyohiro KAMADA, Akihiro Kuribayashi, Jun Ogawa | 2018-03-20 |
| 7413765 | Film forming method for manufacturing planar periodic structure having predetermined periodicity | Tatsuya Ito | 2008-08-19 |
| 6917835 | Programmable controller system | Katsunari Koyama, Tsuyoshi Kimura | 2005-07-12 |
| 6220404 | Non-asbestos disc brake pad for automobiles | Yasuhiro Hara, Mitsuhiro Inoue, Takahiro Mibe, Hiroyuki Nakanishi | 2001-04-24 |
| 6070904 | Air bag device with breakable retainer strap | Toru Ozaki, Takeshi Yamaji, Kazuaki Bito, Hidehito Sogi, Kenji Kaneko +1 more | 2000-06-06 |