Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12432819 | Substrate fixing device | Riku Nishikawa | 2025-09-30 |
| 12077855 | Cleaning method and film deposition apparatus | Hideomi HANE, Noriaki Fukiage | 2024-09-03 |
| 11869793 | Electrostatic chuck and substrate fixing device | Hiroyuki Kobayashi | 2024-01-09 |
| 11473194 | Cleaning method of deposition apparatus | Jun Ogawa, Hiroyuki Wada, Takeshi Oyama | 2022-10-18 |
| 11201053 | Film forming method and film forming apparatus | Noriaki Fukiage, Takayuki Karakawa, Toyohiro KAMADA, Takeshi Oyama, Jun Ogawa +3 more | 2021-12-14 |
| 10714332 | Film forming method and film forming apparatus | Noriaki Fukiage, Takayuki Karakawa, Toyohiro KAMADA, Takeshi Oyama, Jun Ogawa +3 more | 2020-07-14 |
| 10090176 | Temperature adjustment device | — | 2018-10-02 |
| 9922820 | Film forming method and film forming apparatus | Noriaki Fukiage, Takayuki Karakawa, Toyohiro KAMADA, Takeshi Oyama, Jun Ogawa | 2018-03-20 |
| 9892909 | Film forming method and film forming apparatus | Noriaki Fukiage, Takayuki Karakawa, Jun Ogawa | 2018-02-13 |
| 9019684 | Electrostatic chuck and method for manufacturing electrostatic chuck | — | 2015-04-28 |
| 8542474 | Electrostatic chuck | Hiroshi Yonekura, Kazuyuki Ogura, Hidehiro Komatsu | 2013-09-24 |