Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837465 | Deposition method | Jun Ogawa | 2023-12-05 |
| 11404265 | Film deposition method | Kazumi Kubo, Yutaka Takahashi | 2022-08-02 |
| 11201053 | Film forming method and film forming apparatus | Noriaki Fukiage, Toyohiro KAMADA, Akihiro Kuribayashi, Takeshi Oyama, Jun Ogawa +3 more | 2021-12-14 |
| 11170999 | Deposition method | Kazumi Kubo, Yutaka Takahashi | 2021-11-09 |
| 10714332 | Film forming method and film forming apparatus | Noriaki Fukiage, Toyohiro KAMADA, Akihiro Kuribayashi, Takeshi Oyama, Jun Ogawa +3 more | 2020-07-14 |
| 10626496 | Film forming apparatus, method of cleaning film forming apparatus, and storage medium | Jun Ogawa, Noriaki Fukiage, Yasuo Kobayashi | 2020-04-21 |
| 10604845 | Substrate processing apparatus and substrate processing method | — | 2020-03-31 |
| 9922820 | Film forming method and film forming apparatus | Noriaki Fukiage, Toyohiro KAMADA, Akihiro Kuribayashi, Takeshi Oyama, Jun Ogawa | 2018-03-20 |
| 9892909 | Film forming method and film forming apparatus | Noriaki Fukiage, Akihiro Kuribayashi, Jun Ogawa | 2018-02-13 |
| 9478410 | Method of forming nitride film with plasma | Toyohiro KAMADA, Noriaki Fukiage | 2016-10-25 |
| 9245741 | Method for forming nitride film using plasma process | — | 2016-01-26 |