Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12371785 | Method for forming film on substrate surface having convex portion | — | 2025-07-29 |
| 11952661 | Deposition method | Hitoshi Kato, Yutaka Takahashi | 2024-04-09 |
| 11404265 | Film deposition method | Takayuki Karakawa, Yutaka Takahashi | 2022-08-02 |
| 11170999 | Deposition method | Yutaka Takahashi, Takayuki Karakawa | 2021-11-09 |
| 11075074 | Method for depositing a silicon nitride film and film deposition apparatus | Hitoshi Kato, Yutaka Takahashi | 2021-07-27 |
| 10748758 | Method for depositing a silicon nitride film and film deposition apparatus | Hitoshi Kato, Yutaka Takahashi | 2020-08-18 |
| 10643837 | Method for depositing a silicon nitride film and film deposition apparatus | Hitoshi Kato, Yutaka Takahashi | 2020-05-05 |
| 10636648 | Film deposition method of depositing film and film deposition apparatus | Yutaka Takahashi, Hitoshi Kato | 2020-04-28 |
| 8518834 | Method and apparatus for forming oxide film on carbon film | Akinobu Kakimoto, Atsushi Endo | 2013-08-27 |
| 7696106 | Film formation method and apparatus for semiconductor process | Mitsuhiro Okada | 2010-04-13 |
| 7637268 | Film formation method and apparatus for semiconductor process | Hitoshi Kato, Masahiko Kaminishi | 2009-12-29 |
| 7105362 | Method of forming dielectric film | Tsuyoshi Takahashi, Hiroshi Shinriki | 2006-09-12 |
| 6953731 | Fabrication process of a semiconductor device | Hiroshi Shinriki | 2005-10-11 |
| 6907059 | Optical component fixing method and optical component support | Hideo Miura | 2005-06-14 |
| 5703900 | Laser-diode-pumped solid state laser and method of manufacturing the same | Nobuharu Nozaki, Shinji Mitsumoto, Fumio Kobayashi | 1997-12-30 |
| 5310918 | 1-aryl-substituted azole, non-linear optical material and novel molecular crystal containing same and method and module for the conversion of light wavelength using same | Nobuhiko Uchino, Masaki Okazaki, Makoto Ishihara, Akinori Harada, Yoji Okazaki | 1994-05-10 |