Issued Patents All Time
Showing 1–25 of 255 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368030 | Deposition method and deposition apparatus | Yu Wamura, Yuichiro Sase, Yuji Sawada, Hiroyuki Kikuchi | 2025-07-22 |
| 12205817 | Method for depositing film and film deposition system | Toru Ishii, Yuji SESHIMO, Yuichiro Sase | 2025-01-21 |
| 12152807 | Liquid atomizing apparatus | Tomokazu EDA, Teruhisa FUJII, Yusuke Shimizu | 2024-11-26 |
| 12051566 | Plasma processing apparatus | Hiroyuki Kikuchi, Shinji Asari, Yuji Sawada | 2024-07-30 |
| 11952661 | Deposition method | Kazumi Kubo, Yutaka Takahashi | 2024-04-09 |
| 11905595 | Film deposition apparatus and film deposition method | Toru Ishii, Yuji SESHIMO, Yuichiro Sase | 2024-02-20 |
| 11823865 | Plasma generation apparatus, deposition apparatus using the same, and deposition method | — | 2023-11-21 |
| 11710633 | Deposition method and deposition apparatus | — | 2023-07-25 |
| 11674225 | Substrate processing apparatus | Yukio Ohizumi, Manabu Honma, Takeshi Kobayashi | 2023-06-13 |
| 11664201 | Substrate holding mechanism and substrate processing apparatus | Toshiyuki Nakatsubo, Takeshi Kobayashi | 2023-05-30 |
| 11655539 | Film deposition apparatus and film deposition method | Tomoya Hasegawa | 2023-05-23 |
| 11572625 | Rotation detection jig, substrate processing apparatus and method of operating the substrate processing apparatus | Takeshi Kobayashi, Yukio Ohizumi | 2023-02-07 |
| 11519067 | Method for depositing a silicon nitride film and film deposition apparatus | — | 2022-12-06 |
| 11417521 | Film forming method and film forming apparatus | — | 2022-08-16 |
| 11359279 | Cleaning method and film deposition method | Makoto Ishigo, Jun Sato | 2022-06-14 |
| 11264266 | Substrate processing method | Yuji Nishino | 2022-03-01 |
| 11248294 | Substrate processing apparatus | — | 2022-02-15 |
| 11155918 | Film forming apparatus | — | 2021-10-26 |
| 11136669 | Film formation apparatus | Takeshi Kobayashi, Toshiyuki Nakatsubo | 2021-10-05 |
| 11118267 | Substrate processing method | Toshiyuki Nakatsubo, Takeshi Kobayashi, Tomoya Hasegawa | 2021-09-14 |
| 11118265 | Film deposition method and computer program storage medium | Shigenori Ozaki, Takeshi Kumagai | 2021-09-14 |
| 11085113 | Film forming method and recording medium | Shigehiro Miura, Hiroyuki Kikuchi, Katsuyoshi Aikawa | 2021-08-10 |
| 11075074 | Method for depositing a silicon nitride film and film deposition apparatus | Yutaka Takahashi, Kazumi Kubo | 2021-07-27 |
| 10974100 | Racket and grommet | Naoto Ogawa, Masato Kawabata, Tsutomu Takahashi | 2021-04-13 |
| 10920316 | Substrate processing apparatus | — | 2021-02-16 |