Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11118265 | Film deposition method and computer program storage medium | Shigenori Ozaki, Hitoshi Kato | 2021-09-14 |
| 10590534 | Film deposition method and film deposition apparatus | — | 2020-03-17 |
| 10458016 | Method for forming a protective film | Yutaka Takahashi, Chihhsiang Hsiao, Atsushi Endo | 2019-10-29 |
| 10389626 | Transfer device | Kazuo Sugai, Shinichi Akahane, Takayuki Muranaka | 2019-08-20 |
| 10326705 | Communication device and communication method | Kazuo Sugai, Yuichi Ishikawa, Naoya Kumita | 2019-06-18 |
| 9677174 | Film deposition method for producing a reaction product on a substrate | Hitoshi Kato | 2017-06-13 |
| 9667548 | Relay apparatus and relay method | Yuichi Ishikawa, Kentarou Sugawara, Naoya Kumita | 2017-05-30 |
| 9551068 | Film forming method and film forming apparatus | Muneyuki OTANI, Kazuya Okubo | 2017-01-24 |
| 9441291 | Method of depositing a film | Muneyuki OTANI | 2016-09-13 |
| 9368341 | Method of manufacturing a silicon oxide film | Tatsuya Tamura | 2016-06-14 |
| 9293321 | Method of manufacturing a silicon oxide film | Tatsuya Tamura, Takashi Chiba | 2016-03-22 |
| 9023738 | Film deposition method | Hitoshi Kato, Tatsuya Tamura | 2015-05-05 |
| 8932963 | Film deposition method | Hitoshi Kato, Hiroyuki Kikuchi | 2015-01-13 |
| 8906246 | Film deposition apparatus and film deposition method | Hitoshi Kato | 2014-12-09 |
| 8882916 | Film deposition apparatus, film deposition method, and computer readable storage medium | Hitoshi Kato | 2014-11-11 |
| 8853097 | Particle reducing method | Hitoshi Kato, Hiroyuki Kikuchi | 2014-10-07 |
| 8835332 | Film deposition method | Hitoshi Kato, Tatsuya Tamura | 2014-09-16 |
| 8774001 | Relay device and relay method | Nobuhito Matsuyama, Takeshi Aimoto, Toshio Doi, Kazuo Sugai | 2014-07-08 |
| 8642487 | Film deposition method and film deposition apparatus | Hitoshi Kato, Shigehiro Ushikubo, Tatsuya Tamura, Shigenori Ozaki, Hiroyuki Kikuchi | 2014-02-04 |
| 8553543 | Traffic shaping method and device | Hideki Hinosugi, Yoshihiko Sakata, Atsushi Anzai, Shinsuke Nakashima | 2013-10-08 |
| 8254252 | Bandwidth control apparatus | Hideki Hinosugi, Atsushi Anzai | 2012-08-28 |
| 7855960 | Traffic shaping method and device | Hideki Hinosugi, Yoshihiko Sakata, Atsushi Anzai, Shinsuke Nakashima | 2010-12-21 |
| 7156923 | Silicon nitride film forming method, silicon nitride film forming system and silicon nitride film forming system precleaning method | Hitoshi Kato, Kohei Fukushima, Atsushi Endo, Tatsuo Nishita | 2007-01-02 |
| 7125812 | CVD method and device for forming silicon-containing insulation film | Hitoshi Katoh, Jinsu Lee, Shingo Maku | 2006-10-24 |
| 6844273 | Precleaning method of precleaning a silicon nitride film forming system | Hitoshi Kato, Kohei Fukushima, Atsushi Endo, Tatsuo Nishita | 2005-01-18 |