Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9159548 | Semiconductor processing system including vaporizer and method for using same | Tsuneyuki Okabe, Junya Hiraka, Hiroyuki Kikuchi | 2015-10-13 |
| 8298341 | Removal of metal contaminant deposited on quartz member of vertical heat processing apparatus | Tsuneyuki Okabe, Kohichi Orito, Takashi Chiba | 2012-10-30 |
| 7125812 | CVD method and device for forming silicon-containing insulation film | Takeshi Kumagai, Jinsu Lee, Shingo Maku | 2006-10-24 |
| 5305313 | Electronic switching system for use in connection to an | — | 1994-04-19 |
| 4623751 | Photovoltaic device and its manufacturing method | Yasuo Kishi, Hiroyuki Taniguchi, Souichi Sakai, Atsuo Mizukami | 1986-11-18 |