Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7509962 | Method and control system for treating a hafnium-based dielectric processing system | David L. O'Meara | 2009-03-31 |
| 7125812 | CVD method and device for forming silicon-containing insulation film | Takeshi Kumagai, Hitoshi Katoh, Jinsu Lee | 2006-10-24 |
| 7094708 | Method of CVD for forming silicon nitride film on substrate | Hitoshi Kato, Koichi Orito, Hiroyuki Kikuchi | 2006-08-22 |