Issued Patents All Time
Showing 25 most recent of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12365985 | Deposition apparatus with pressure sensor and shower head on same plane and deposition method | Yuji Obata | 2025-07-22 |
| 11965242 | Raw material supply apparatus and raw material supply method | Seishi Murakami, Eiichi KOMORI | 2024-04-23 |
| 11774015 | Pipe joint | Akihiro Harada, Tomohiro Nakata, Yuya Shindo | 2023-10-03 |
| 11402124 | Fluid heater, fluid control apparatus, and production method for fluid heater | Toshiyuki Inada, Taiji Chiba, Tatsuhiko SATO, Michio Yamaji, Tadayuki Yakushijin | 2022-08-02 |
| 11255468 | Gasket for fluid coupling, and fluid coupling | Keisuke Ishibashi, Tadayuki Yakushijin, Tsuyoshi Tanikawa, Michio Yamaji | 2022-02-22 |
| 11208721 | Substrate processing apparatus | Kohei Fukushima | 2021-12-28 |
| 10753497 | Shutoff-opening device | Keisuke Ishibashi, Tsuyoshi Tanikawa, Michio Yamaji, Takashi Funakoshi, Hidenori Kiso +2 more | 2020-08-25 |
| 10669632 | Processing apparatus | Masahiro Kikuchi | 2020-06-02 |
| 10429263 | Pressure measuring device and exhaust system using the same, and substrate processing apparatus | Satoshi Kikuchi, Satoru Koike | 2019-10-01 |
| 10287682 | Substrate processing apparatus, gas supply method, substrate processing method, and film forming method | Kazuyuki Kikuchi, Kohei Fukushima | 2019-05-14 |
| 9435470 | Pipe joint | Shuji Moriya, Kenichi Sato, Tomohiro Nakata, Tsutomu Shinohara, Michio Yamaji | 2016-09-06 |
| 9371946 | Pipe joint | Shuji Moriya, Kenichi Sato, Tomohiro Nakata, Tsutomu Shinohara, Michio Yamaji | 2016-06-21 |
| 9159548 | Semiconductor processing system including vaporizer and method for using same | Hitoshi Katoh, Junya Hiraka, Hiroyuki Kikuchi | 2015-10-13 |
| 8973615 | Fluid control device | George Hoshi, Kenichi Goshima, Hideo Kobayashi, Akinori Nagaya, Michio Yamaji +2 more | 2015-03-10 |
| 8944095 | Gas supply apparatus for semiconductor manufacturing apparatus | — | 2015-02-03 |
| 8893743 | Flow rate controller and processing apparatus | Shuji Moriya, Kazushige Matsuno | 2014-11-25 |
| 8851106 | Gas supplying apparatus, cylinder cabinet provided with the same, valve box, and substrate process apparatus | — | 2014-10-07 |
| 8387559 | Semiconductor manufacturing plant | Jiro Hiraiwa, Osamu Yoshimoto, Hiroshi Hayakawa, Tetsuro Tojo, Takanobu Asano +3 more | 2013-03-05 |
| 8382903 | Vaporizer and semiconductor processing system | Shigeyuki Okura, Kazuo Ujiie | 2013-02-26 |
| 8371334 | Rotary switching valve | Yukio Ozawa, Takashi Yajima, Shigeyuki Okura | 2013-02-12 |
| 8298341 | Removal of metal contaminant deposited on quartz member of vertical heat processing apparatus | Hitoshi Katoh, Kohichi Orito, Takashi Chiba | 2012-10-30 |
| 8219329 | Thermal type mass flow meter, and thermal type mass flow control device | Hiroyuki Ebi, Tetsuo Shimizu, Hitoshi Kitagawa, Shuji Moriya | 2012-07-10 |
| 8197600 | Vaporizer and semiconductor processing system | Ken Nakao, Hitoshi Kato, Shigeyuki Okura | 2012-06-12 |
| 8104516 | Gas supply unit and gas supply system | Shuji Moriya, Hideki Nagaoka, Hiroshi Itafuji, Hiroki Doi, Minoru Ito | 2012-01-31 |
| 7954452 | Film formation apparatus for semiconductor process and method for using the same | Hitoshi Kato | 2011-06-07 |