Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12123520 | Diaphragm, valve device, and method for manufacturing diaphragm | Kenta KONDO, Tomohiro Nakata, Kazunari Watanabe, Tomoki Nakada | 2024-10-22 |
| 11774000 | Fluid control device and manufacturing method for the fluid control device | Kenji Aikawa, Tomohiro Nakata, Akihiro Harada, Takahiro Matsuda, Tsutomu Shinohara | 2023-10-03 |
| 11402124 | Fluid heater, fluid control apparatus, and production method for fluid heater | Tsuneyuki Okabe, Taiji Chiba, Tatsuhiko SATO, Michio Yamaji, Tadayuki Yakushijin | 2022-08-02 |
| 11397443 | Fluid control device and semiconductor manufacturing apparatus | Kenji Aikawa, Takahiro Matsuda, Kazunari Watanabe, Yuta Motegi, Tomohiro Nakata +1 more | 2022-07-26 |
| 11346461 | Manual valve device and fluid control device | Kazunari Watanabe, Tomohiro Nakata, Tsutomu Shinohara | 2022-05-31 |
| 11261990 | Actuator and valve device | Takeru Miura, Tsutomu Shinohara, Tomohiro Nakata, Kazunari Watanabe, Kenta KONDO +2 more | 2022-03-01 |
| 11255458 | Valve device and fluid control device | Takahiro Matsuda, Kenji Aikawa, Kazunari Watanabe, Yuta Motegi, Tomohiro Nakata +1 more | 2022-02-22 |
| 11098819 | Valve device, flow control method using the same, and semiconductor manufacturing method | Toshihide Yoshida, Tomohiro Nakata, Tsutomu Shinohara, Takashi Funakoshi | 2021-08-24 |
| 11073215 | Gas supply system | Takeru Miura, Tomohiro Nakata, Kazunari Watanabe, Kenta KONDO, Hidenobu Sato | 2021-07-27 |
| 11047503 | Actuator, valve device, and fluid supply system | Takeru Miura, Tsutomu Shinohara, Tomohiro Nakata, Kazunari Watanabe, Kenta KONDO +2 more | 2021-06-29 |
| 11022224 | Valve device, flow control method using the same, and semiconductor manufacturing method | Toshihide Yoshida, Tomohiro Nakata, Tsutomu Shinohara, Takashi Funakoshi, Hidenobu Sato +1 more | 2021-06-01 |
| 10737345 | Pipe joint, fluid control device, fluid control unit, semiconductor fabrication apparatus and method of forming pipe joint | Kazunari Watanabe, Tsutomu Shinohara, Tomohiro Nakata | 2020-08-11 |
| 10473247 | Method of forming a pipe joint, pipe joint component, and pipe joint, fluid control device, fluid control unit and semiconductor fabrication apparatus including the pipe joint component | Kazunari Watanabe, Izuru Shikata, Tsutomu Shinohara | 2019-11-12 |
| 9850920 | Fluid control apparatus | Takahiro Matsuda, Mutsunori Koyomogi | 2017-12-26 |
| 9395006 | Check valve | Shunya Ikeda, Mutsunori Koyomogi, Megumu Makino | 2016-07-19 |