Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11859733 | Valve device, fluid control device, and manufacturing method of valve device | Akihiro Harada, Tomohiro Nakata, Michio Yamaji, Tadayuki Yakushijin, Keisuke Ishibashi | 2024-01-02 |
| 11506295 | Valve device, fluid control device, fluid control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method | Tatsuhiko SATO, Tomohiro Nakata, Tsutomu Shinohara | 2022-11-22 |
| 11402029 | Valve device, fluid control system, fluid control method, semiconductor manufacturing system, and semiconductor manufacturing method | Tatsuhiko SATO, Tsutomu Shinohara, Tomohiro Nakata | 2022-08-02 |
| 11261990 | Actuator and valve device | Tsutomu Shinohara, Tomohiro Nakata, Toshiyuki Inada, Kazunari Watanabe, Kenta KONDO +2 more | 2022-03-01 |
| 11242934 | Valve device | Kenta KONDO, Toshihide Yoshida, Masahiko TAKIMOTO, Tsutomu Shinohara, Tomohiro Nakata +1 more | 2022-02-08 |
| 11174949 | Actuator and valve device using the same | Tomohiro Nakata, Tatsuhiko SATO | 2021-11-16 |
| 11073215 | Gas supply system | Tomohiro Nakata, Toshiyuki Inada, Kazunari Watanabe, Kenta KONDO, Hidenobu Sato | 2021-07-27 |
| 11047503 | Actuator, valve device, and fluid supply system | Tsutomu Shinohara, Tomohiro Nakata, Toshiyuki Inada, Kazunari Watanabe, Kenta KONDO +2 more | 2021-06-29 |