Issued Patents All Time
Showing 25 most recent of 121 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12326718 | Operation information collection system for fluid control device, fluid control device, operation information collection method for fluid control device, and computer executable program | Yuya Suzuki, Ryutaro Tanno, Koudai Okazaki | 2025-06-10 |
| 12209679 | Fluid control device, fluid supply system, and fluid supply method | Masahiko TAKIMOTO, Toshihide Yoshida, Kouji Nishino | 2025-01-28 |
| 12135097 | Fluid control device | Kengo TSUJINO, Ryutaro Tanno, Hiroto Shibata, Akihiro Harada, Tomohiro Nakata | 2024-11-05 |
| 12123517 | Valve, abnormality diagnosis method of valve | Ryutaro Tanno, Kenji Aikawa, Akihiro Harada, Yuya Suzuki, Takahiro Matsuda +2 more | 2024-10-22 |
| 12085186 | Valve and fluid control device with a magnetic indicator | Kengo TSUJINO, Tomoki Nakada, Ryutaro Tanno, Yuya Suzuki, Akihiro Harada | 2024-09-10 |
| 11988302 | Fluid control device, abnormality detection method of fluid control device, abnormality detection device, and abnormality detection system | Ryutaro Tanno, Yuya Suzuki, Hidenori Kiso | 2024-05-21 |
| 11960308 | Fluid control apparatus, fluid control device, and operation analysis system | Ryutaro Tanno, Yuya Suzuki, Hidenori Kiso | 2024-04-16 |
| 11927280 | Diaphragm valve and monitoring method thereof with improved leak detection | Yuya Suzuki, Ryutaro Tanno, Daihi TSUCHIGUCHI, Nobuo Nakamura | 2024-03-12 |
| 11879560 | Flow-path forming block and fluid control device provided with flow-path forming block | Kazunari Watanabe, Kenji Aikawa, Kohei Shigyou, Tomohiro Nakata, Takahiro Matsuda | 2024-01-23 |
| 11873916 | Fluid control device, fluid supply system, and fluid supply method | Masahiko TAKIMOTO, Toshihide Yoshida, Kouji Nishino | 2024-01-16 |
| 11774000 | Fluid control device and manufacturing method for the fluid control device | Kenji Aikawa, Tomohiro Nakata, Toshiyuki Inada, Akihiro Harada, Takahiro Matsuda | 2023-10-03 |
| 11732818 | Electromagnetic valve, valve device, fluid control device, and electromagnetic valve replacement method | Ryutaro Tanno, Yuya Suzuki, Tomohiro Nakata, Akira Watanabe, Takahiro Kawano | 2023-08-22 |
| 11713819 | Valve device | Nobuo Nakamura, Kenta KONDO, Tomohiro Nakata | 2023-08-01 |
| 11669067 | Work management apparatus, work management method, and work management system | Yuto Kawauchi, Yuya Suzuki, Ryutaro Tanno, Akihiro Harada | 2023-06-06 |
| 11598430 | Valve device, flow rate control method, fluid control device, semiconductor manufacturing method, and semiconductor manufacturing apparatus using the valve device | Daihi TSUCHIGUCHI, Toshihide Yoshida, Ryutaro Tanno, Yuya Suzuki, Kenta KONDO +2 more | 2023-03-07 |
| 11586175 | Tool, task management device, task management method, and task management system | Kazutoshi Horikawa, Toru Nebashi, Hidekazu Machida, Nozomi Shimoishizaka, Akihiro Harada +4 more | 2023-02-21 |
| 11569101 | Fluid supply device and fluid supply method | Toshihide Yoshida, Yukio Minami | 2023-01-31 |
| 11536386 | Fluid control device | Ryutaro Tanno, Yuya Suzuki, Hidenori Kiso, Yoshiaki Watanabe | 2022-12-27 |
| 11536385 | Fluid control device | Ryutaro Tanno, Yuya Suzuki, Hidenori Kiso | 2022-12-27 |
| 11512993 | Valve device, adjustment information generating method, flow rate adjusting method, fluid control system, flow rate control method, semiconductor manufacturing system and semiconductor manufacturing method | Kenta KONDO, Toshihide Yoshida, Hidenobu Sato, Tomohiro Nakata, Masahiko TAKIMOTO | 2022-11-29 |
| 11506290 | Valve apparatus, flow rate adjusting method, fluid control apparatus, flow rate control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method | Kenta KONDO, Toshihide Yoshida, Kenji Aikawa, Hidenobu Sato, Tomohiro Nakata +1 more | 2022-11-22 |
| 11506295 | Valve device, fluid control device, fluid control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method | Tatsuhiko SATO, Tomohiro Nakata, Takeru Miura | 2022-11-22 |
| 11472009 | Manual tool, and bit and torque sensor used therefor | Akihiro Harada, Masahiko Ochiishi, Ichiro Sasada | 2022-10-18 |
| 11427911 | Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device | Kazunari Watanabe, Kohei Shigyou, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda | 2022-08-30 |
| 11402029 | Valve device, fluid control system, fluid control method, semiconductor manufacturing system, and semiconductor manufacturing method | Tatsuhiko SATO, Tomohiro Nakata, Takeru Miura | 2022-08-02 |