Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12123517 | Valve, abnormality diagnosis method of valve | Ryutaro Tanno, Akihiro Harada, Yuya Suzuki, Takahiro Matsuda, Katsunori Komehana +2 more | 2024-10-22 |
| 11906062 | Fluid control device, joint block and manufacturing method for fluid control device | Akihiro Harada | 2024-02-20 |
| 11879560 | Flow-path forming block and fluid control device provided with flow-path forming block | Kazunari Watanabe, Kohei Shigyou, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara | 2024-01-23 |
| 11774000 | Fluid control device and manufacturing method for the fluid control device | Tomohiro Nakata, Toshiyuki Inada, Akihiro Harada, Takahiro Matsuda, Tsutomu Shinohara | 2023-10-03 |
| 11506290 | Valve apparatus, flow rate adjusting method, fluid control apparatus, flow rate control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method | Kenta KONDO, Toshihide Yoshida, Hidenobu Sato, Tomohiro Nakata, Tsutomu Shinohara +1 more | 2022-11-22 |
| 11427911 | Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device | Kazunari Watanabe, Kohei Shigyou, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara | 2022-08-30 |
| 11397443 | Fluid control device and semiconductor manufacturing apparatus | Takahiro Matsuda, Toshiyuki Inada, Kazunari Watanabe, Yuta Motegi, Tomohiro Nakata +1 more | 2022-07-26 |
| 11365830 | Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device | Kazunari Watanabe, Kohei Shigyou, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara | 2022-06-21 |
| 11346505 | Fluid supply system, fluid control device, and semiconductor manufacturing device | Haruhiko Kuriki, Hajime Nakagawa | 2022-05-31 |
| 11340636 | Abnormality diagnosis method of fluid supply line | Ryutaro Tanno, Akihiro Harada, Yuya Suzuki, Takahiro Matsuda, Katsunori Komehana +2 more | 2022-05-24 |
| 11320056 | Valve device | Kazunari Watanabe, Kohei Shigyou, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara | 2022-05-03 |
| 11255458 | Valve device and fluid control device | Takahiro Matsuda, Toshiyuki Inada, Kazunari Watanabe, Yuta Motegi, Tomohiro Nakata +1 more | 2022-02-22 |
| 11243549 | Valve and fluid supply line | Ryutaro Tanno, Akihiro Harada, Yuya Suzuki, Takahiro Matsuda, Katsunori Komehana +2 more | 2022-02-08 |
| 11231026 | Valve device | Kazunari Watanabe, Kohei Shigyou, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara | 2022-01-25 |
| 11162597 | Flow path assembly and valve device | Kazunari Watanabe, Kohei Shigyou, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara | 2021-11-02 |
| 11156305 | Fluid control system | Tsutomu Shinohara, Hajime Nakagawa, Takahiro Matsuda, Akihiro Harada | 2021-10-26 |
| 10962513 | Concentration detection method and pressure-type flow rate control device | Masaaki Nagase, Kaoru Hirata, Takahiro Imai, Tetsuo Naritomi, Tsutomu Shinohara +2 more | 2021-03-30 |
| 10830367 | Fluid control system | Tsutomu Shinohara, Hajime Nakagawa, Takahiro Matsuda, Akihiro Harada | 2020-11-10 |
| 10125803 | Fixing device for lower level member and fluid control apparatus provided with the same | Takahiro Matsuda | 2018-11-13 |
| 9810252 | Lower member fixing device and fluid control device provided with the same | Takahiro Matsuda | 2017-11-07 |