Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12152685 | Fluid control apparatus | Shinya Nogari | 2024-11-26 |
| 11346505 | Fluid supply system, fluid control device, and semiconductor manufacturing device | Hajime Nakagawa, Kenji Aikawa | 2022-05-31 |
| 9212755 | Fluid control device | Takahiro Matsuda, Mutsunori Koyomogi, Megumu Makino | 2015-12-15 |