Issued Patents All Time
Showing 25 most recent of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12398819 | Controller and vaporization supply device | Atsushi Hidaka, Kazuteru Tanaka, Takatoshi NAKATANI, Kazuyuki Morisaki, Masafumi Kitano +3 more | 2025-08-26 |
| 12334355 | Pressure control device | Kouji Nishino, Katsuyuki Sugita, Shinya Ogawa, Keisuke Ideguchi | 2025-06-17 |
| 12306647 | Flow rate control device and flow rate control method wherein an internal command signal is generated by a combination of first order lag process and ramp process | Katsuyuki Sugita, Kouji Nishino, Shinya Ogawa, Keisuke Ideguchi | 2025-05-20 |
| 12174647 | Flow rate control device | Keisuke Ideguchi, Shinya Ogawa, Katsuyuki Sugita, Masaaki Nagase, Kouji Nishino +2 more | 2024-12-24 |
| 12007797 | Flow rate control device and flow rate control method | Katsuyuki Sugita, Kouji Nishino, Naofumi Yasumoto, Shinya Ogawa, Keisuke Ideguchi | 2024-06-11 |
| 11988543 | Abnormality detection method for flow rate control device, and flow rate monitoring method | Atsushi Hidaka, Masaaki Nagase, Kouji Nishino, Nobukazu Ikeda | 2024-05-21 |
| 11976748 | Diaphragm valve | Masaaki Nagase, Atsushi Hidaka, Kazuyuki Morisaki, Keisuke Ideguchi, Kosuke SUGIMOTO +3 more | 2024-05-07 |
| 11914407 | Flow rate control device | Keisuke Ideguchi, Shinya Ogawa, Katsuyuki Sugita, Masaaki Nagase, Kouji Nishino +2 more | 2024-02-27 |
| 11733721 | Flow rate control device and flow rate control method | Katsuyuki Sugita, Kouji Nishino, Naofumi Yasumoto, Shinya Ogawa, Keisuke Ideguchi | 2023-08-22 |
| 11416011 | Pressure-type flow control device and flow control method | Katsuyuki Sugita, Nobukazu Ikeda, Kouji Nishino, Masahiko TAKIMOTO, Takahiro Imai +1 more | 2022-08-16 |
| 11402250 | Liquid level meter, vaporizer equipped with the same, and liquid level detection method | Atsushi Hidaka, Takatoshi NAKATANI, Satoru Yamashita, Katsuyuki Sugita, Masaaki Nagase +2 more | 2022-08-02 |
| 11391608 | Self-diagnosis method for flow rate control device | Katsuyuki Sugita, Ryousuke Dohi, Koji Kawada, Nobukazu Ikeda, Kouji Nishino | 2022-07-19 |
| 11346457 | Piezoelectric driven valve, pressure-type flow rate control device, and vaporization supply device | Ryousuke Dohi, Katsuyuki Sugita, Koji Kawada, Kouji Nishino, Nobukazu Ikeda | 2022-05-31 |
| 11313756 | Flow rate control device and abnormality detection method using flow rate control device | Masaaki Nagase, Yohei Sawada, Kouji Nishino, Nobukazu Ikeda | 2022-04-26 |
| 11269362 | Flow rate control method and flow rate control device | Shinya Ogawa, Katsuyuki Sugita, Kouji Nishino, Nobukazu Ikeda | 2022-03-08 |
| 11226641 | Fluid control device | Katsuyuki Sugita, Takahiro Imai, Shinya Ogawa, Kouji Nishino, Nobukazu Ikeda | 2022-01-18 |
| 11216016 | Flow rate control method and flow rate control device | Shinya Ogawa, Katsuyuki Sugita, Kouji Nishino, Nobukazu Ikeda | 2022-01-04 |
| 11137779 | Fluid control device, method for controlling fluid control device, and fluid control system | Katsuyuki Sugita, Yohei Sawada, Masahiko TAKIMOTO, Kouji Nishino | 2021-10-05 |
| 11079774 | Flow rate control device | Katsuyuki Sugita, Ryousuke Dohi, Koji Kawada, Nobukazu Ikeda, Kouji Nishino | 2021-08-03 |
| 11054052 | Piezoelectric-element-driven valve and flow rate control device | Ryousuke Dohi, Katsuyuki Sugita, Koji Kawada, Kouji Nishino, Nobukazu Ikeda | 2021-07-06 |
| 10962513 | Concentration detection method and pressure-type flow rate control device | Masaaki Nagase, Kenji Aikawa, Takahiro Imai, Tetsuo Naritomi, Tsutomu Shinohara +2 more | 2021-03-30 |
| 10928813 | Pressure-type flow rate control device and flow rate self-diagnosis method using critical expansion condition | Masaaki Nagase, Yohei Sawada, Katsuyuki Sugita, Kouji Nishino, Nobukazu Ikeda | 2021-02-23 |
| 10884436 | Flow rate signal correction method and flow rate control device employing same | Katsuyuki Sugita, Nobukazu Ikeda, Kouji Nishino, Masahiko TAKIMOTO, Masayoshi Kawashima +1 more | 2021-01-05 |
| 10884435 | Pressure type flow rate control device, and flow rate calculating method and flow rate control method for same | Masaaki Nagase, Kouji Nishino, Nobukazu Ikeda | 2021-01-05 |
| 10883866 | Pressure-based flow rate control device and malfunction detection method therefor | Katsuyuki Sugita, Kouji Nishino, Masahiko TAKIMOTO, Nobukazu Ikeda | 2021-01-05 |