Issued Patents All Time
Showing 26–50 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10838435 | Pressure-type flow rate control device | Katsuyuki Sugita, Nobukazu Ikeda, Kouji Nishino | 2020-11-17 |
| 10646844 | Vaporization supply apparatus | Atsushi Hidaka, Masaaki Nagase, Katsuyuki Sugita, Takatoshi NAKATANI, Satoru Yamashita +3 more | 2020-05-12 |
| 10648572 | Valve with built-in orifice, and pressure-type flow rate control device | Yohei Sawada, Masaaki Nagase, Kouji Nishino, Nobukazu Ikeda | 2020-05-12 |
| 10641407 | Flow rate control device | Toru Hirai, Kazuyuki Morisaki, Kouji Nishino, Nobukazu Ikeda | 2020-05-05 |
| 10604840 | Liquid level indicator and liquid raw material vaporization feeder | Atsushi Hidaka, Masaaki Nagase, Satoru Yamashita, Keiji Hirao, Kouji Nishino +1 more | 2020-03-31 |
| 10534376 | Gas divided flow supplying apparatus for semiconductor manufacturing equipment | Kouji Nishino, Ryousuke Dohi, Katsuyuki Sugita, Nobukazu Ikeda | 2020-01-14 |
| 10386861 | Pressure type flow control system with flow monitoring, and method for detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the same | Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda, Katsuyuki Sugita | 2019-08-20 |
| 10386863 | Pressure-type flow controller | Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi, Katsuyuki Sugita | 2019-08-20 |
| 10372145 | Pressure-type flow rate control device | Takashi Hirose, Toshihide Yoshida, Atsushi Matsumoto, Nobukazu Ikeda, Kouji Nishino +2 more | 2019-08-06 |
| 10274356 | Liquid level detection circuit, liquid level meter, container provided with liquid level meter, and vaporizer using container | Katsuyuki Sugita, Atsushi Hidaka, Kouji Nishino, Nobukazu Ikeda | 2019-04-30 |
| 10261522 | Pressure-type flow rate control device | Masaaki Nagase, Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda | 2019-04-16 |
| 10174858 | Piezoelectric element-driven valve and flow rate control device including piezoelectric element-driven valve | Katsuyuki Sugita, Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda | 2019-01-08 |
| 9921089 | Flow rate range variable type flow rate control apparatus | Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kazuyuki Miura +10 more | 2018-03-20 |
| 9870006 | Pressure type flow control system with flow monitoring | Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda, Katsuyuki Sugita | 2018-01-16 |
| 9841770 | Pressure-type flow control device and method for preventing overshooting at start of flow control performed by said device | Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi, Katsuyuki Sugita, Masaaki Nagase | 2017-12-12 |
| 9746856 | Multi-hole orifice plate for flow control, and flow controller using the same | Atsushi Hidaka, Masaaki Nagase, Ryousuke Dohi, Nobukazu Ikeda, Kouji Nishino +2 more | 2017-08-29 |
| 9632511 | Pressure type flow control system with flow monitoring, and method for detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the same | Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda, Katsuyuki Sugita | 2017-04-25 |
| 9631777 | Raw material vaporizing and supplying apparatus equipped with raw material concentration | Masaaki Nagase, Atushi Hidaka, Kouji Nishino, Nobukazu Ikeda, Takeshi Nakamura | 2017-04-25 |
| 9556518 | Raw material gas supply apparatus for semiconductor manufacturing equipment | Masaaki Nagase, Atsushi Hidaka, Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda | 2017-01-31 |
| 9494947 | Pressure type flow control system with flow monitoring | Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda, Katsuyuki Sugita | 2016-11-15 |
| 9383758 | Flow rate range variable type flow rate control apparatus | Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kazuyuki Miura +10 more | 2016-07-05 |
| 9163743 | Piezoelectrically driven valve and piezoelectrically driven flow rate control device | Atsushi Hidaka, Masaaki Nagase, Nobukazu Ikeda, Ryousuke Dohi, Kouji Nishino | 2015-10-20 |
| 9133951 | Gasket type orifice and pressure type flow rate control apparatus for which the orifice is employed | Tadahiro Ohmi, Kouji Nishino, Ryousuke Dohi, Nobukazu Ikeda, Masaaki Nagase +6 more | 2015-09-15 |
| 9010369 | Flow rate range variable type flow rate control apparatus | Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kazuyuki Miura +10 more | 2015-04-21 |
| 8931506 | Gas supply apparatus equipped with vaporizer | Atsushi Nagata, Masaaki Nagase, Atsushi Hidaka, Atsushi Matsumoto, Kouji Nishino +2 more | 2015-01-13 |