Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405182 | Cover component for pressure sensor, and pressure sensor device comprising same | Takatoshi NAKATANI, Tomokazu Hirota, Kouji Nishino, Nobukazu Ikeda | 2025-09-02 |
| 12398819 | Controller and vaporization supply device | Kazuteru Tanaka, Takatoshi NAKATANI, Kazuyuki Morisaki, Masafumi Kitano, Kaoru Hirata +3 more | 2025-08-26 |
| 12203558 | Casing for fluid controller and fluid controller provided with same | Takatoshi NAKATANI, Kazuyuki Morisaki, Tomokazu Hirota, Kouji Nishino, Nobukazu Ikeda | 2025-01-21 |
| 11994482 | Driving device provided with piezoelectric element deterioration detection circuit and deterioration detection method | Katsuyuki Sugita, Takatoshi NAKATANI, Kouji Nishino, Nobukazu Ikeda | 2024-05-28 |
| 11988543 | Abnormality detection method for flow rate control device, and flow rate monitoring method | Masaaki Nagase, Kouji Nishino, Nobukazu Ikeda, Kaoru Hirata | 2024-05-21 |
| 11976748 | Diaphragm valve | Kaoru Hirata, Masaaki Nagase, Kazuyuki Morisaki, Keisuke Ideguchi, Kosuke SUGIMOTO +3 more | 2024-05-07 |
| 11976356 | Vaporized feed device | Takatoshi NAKATANI, Ichiro Tokuda, Keisuke Nakatsuji | 2024-05-07 |
| 11768123 | Diaphragm type pressure sensor arrangement having corrosion resistance and yield strength | Takatoshi NAKATANI, Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi | 2023-09-26 |
| 11402250 | Liquid level meter, vaporizer equipped with the same, and liquid level detection method | Takatoshi NAKATANI, Satoru Yamashita, Katsuyuki Sugita, Kaoru Hirata, Masaaki Nagase +2 more | 2022-08-02 |
| 11390951 | Fluid control device | Takatoshi NAKATANI, Keisuke Nakatsuji, Keiji Hirao, Yukio Minami, Nobukazu Ikeda | 2022-07-19 |
| 10646844 | Vaporization supply apparatus | Masaaki Nagase, Kaoru Hirata, Katsuyuki Sugita, Takatoshi NAKATANI, Satoru Yamashita +3 more | 2020-05-12 |
| 10604840 | Liquid level indicator and liquid raw material vaporization feeder | Masaaki Nagase, Kaoru Hirata, Satoru Yamashita, Keiji Hirao, Kouji Nishino +1 more | 2020-03-31 |
| 10274356 | Liquid level detection circuit, liquid level meter, container provided with liquid level meter, and vaporizer using container | Kaoru Hirata, Katsuyuki Sugita, Kouji Nishino, Nobukazu Ikeda | 2019-04-30 |
| 10073469 | Flow meter and flow control device provided therewith | Masaaki Nagase, Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi, Katsuyuki Sugita | 2018-09-11 |
| 9994955 | Raw material vaporization and supply apparatus | Masaaki Nagase, Satoru Yamashita, Kouji Nishino, Nobukazu Ikeda | 2018-06-12 |
| 9791867 | Flow control device equipped with flow monitor | Masaaki Nagase, Kouji Nishino, Nobukazu Ikeda | 2017-10-17 |
| 9746856 | Multi-hole orifice plate for flow control, and flow controller using the same | Kaoru Hirata, Masaaki Nagase, Ryousuke Dohi, Nobukazu Ikeda, Kouji Nishino +2 more | 2017-08-29 |
| 9733649 | Flow control system with build-down system flow monitoring | Masaaki Nagase, Kouji Nishino, Nobukazu Ikeda | 2017-08-15 |
| 9574917 | Pressure type flow rate control device | Masaaki Nagase, Ryousuke Dohi, Nobukazu Ikeda, Kouji Nishino | 2017-02-21 |
| 9556518 | Raw material gas supply apparatus for semiconductor manufacturing equipment | Masaaki Nagase, Kaoru Hirata, Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda | 2017-01-31 |
| 9163743 | Piezoelectrically driven valve and piezoelectrically driven flow rate control device | Kaoru Hirata, Masaaki Nagase, Nobukazu Ikeda, Ryousuke Dohi, Kouji Nishino | 2015-10-20 |
| 8931506 | Gas supply apparatus equipped with vaporizer | Atsushi Nagata, Masaaki Nagase, Kaoru Hirata, Atsushi Matsumoto, Kouji Nishino +2 more | 2015-01-13 |
| 8724974 | Vaporizer | Tadahiro Ohmi, Yasuyuki Shirai, Masaaki Nagase, Satoru Yamashita, Ryousuke Dohi +3 more | 2014-05-13 |
| 8047510 | Evaporation supply apparatus for raw material and automatic pressure regulating device used therewith | Kaoru Hirata, Masaaki Nagase, Atsushi Matsumoto, Ryousuke Dohi, Kouji Nishino +1 more | 2011-11-01 |