Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12398819 | Controller and vaporization supply device | Atsushi Hidaka, Kazuteru Tanaka, Takatoshi NAKATANI, Kazuyuki Morisaki, Kaoru Hirata +3 more | 2025-08-26 |
| 11976748 | Diaphragm valve | Kaoru Hirata, Masaaki Nagase, Atsushi Hidaka, Kazuyuki Morisaki, Keisuke Ideguchi +3 more | 2024-05-07 |
| 11392148 | Flow rate control system, control method of flowrate control system, and control program of flowrate control system | Van Tu Nguyen | 2022-07-19 |
| 9476137 | Metal oxide film, laminate, metal member and process for producing the same | Tadahiro Ohmi, Yasuyuki Shirai, Hitoshi Morinaga, Yasuhiro Kawase, Fumikazu Mizutani +1 more | 2016-10-25 |
| 8691017 | Heat equalizer and organic film forming apparatus | Tadahiro Ohmi, Hisaaki Yamakage, Yoshihito Yamada | 2014-04-08 |
| 8679640 | Al alloy member, electronic device manufacturing apparatus, and method of manufacturing an anodic oxide film coated al alloy member | Tadahiro Ohmi, Minoru Tahara, Hisakazu Ito, Kota Shirai, Masayuki Saeki | 2014-03-25 |
| 8573151 | Microwave plasma processing apparatus, dielectric window for use in the microwave plasma processing apparatus, and method for manufacturing the dielectric window | Tadahiro Ohmi, Masaki Hirayama, Tetsuya Goto, Yasuyuki Shirai, Kohei Watanuki +2 more | 2013-11-05 |
| 8250966 | Method of manufacturing bellows | Tsutomu Yoshida, Tadahiro Ohmi, Yasuyuki Shirai | 2012-08-28 |
| 8206833 | Metal oxide film, laminate, metal member and process for producing the same | Tadahiro Ohmi, Yasuyuki Shirai, Hitoshi Morinaga, Yasuhiro Kawase, Fumikazu Mizutani +1 more | 2012-06-26 |
| 8124240 | Protective film structure of metal member, metal component employing protective film structure, and equipment for producing semiconductor or flat-plate display employing protective film structure | Tadahiro Ohmi, Yasuyuki Shirai, Hitoshi Morinaga, Yasuhiro Kawase, Fumikazu Mizutani +2 more | 2012-02-28 |
| 7988130 | Valve for vacuum exhaustion system | Tadahiro Ohmi, Nobukazu Ikeda, Michio Yamaji, Akihiro Morimoto | 2011-08-02 |
| 7595087 | Process of forming platinum coating catalyst layer in moisture-generating reactor | Tadahiro Ohmi, Nobukazu Ikeda, Akihiro Morimoto, Yukio Minami, Koji Kawada | 2009-09-29 |
| 7472887 | Valve for vacuum exhaustion system | Tadahiro Ohmi, Nobukazu Ikeda, Michio Yamaji, Akihiro Morimoto | 2009-01-06 |
| 7416165 | Diaphragm valve for the vacuum exhaustion system | Tadahiro Ohmi, Nobukazu Ikeda, Michio Yamaji, Akihiro Morimoto | 2008-08-26 |
| 7334769 | Resin molding machine and member for resin molding machine having film in passive state | Tadahiro Ohmi, Naoki Tanahashi | 2008-02-26 |