Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8573151 | Microwave plasma processing apparatus, dielectric window for use in the microwave plasma processing apparatus, and method for manufacturing the dielectric window | Tadahiro Ohmi, Masaki Hirayama, Tetsuya Goto, Yasuyuki Shirai, Masafumi Kitano +2 more | 2013-11-05 |
| 8188468 | Compound-type thin film, method of forming the same, and electronic device using the same | Tadahiro Ohmi, Hirokazu Asahara, Atsutoshi Inokuchi | 2012-05-29 |