Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495439 | Plasma processing apparatus | Kohei Mizota, Shin Okamoto | 2022-11-08 |
| 9767994 | Shower plate sintered integrally with gas release hole member and method for manufacturing the same | Masahiro Okesaku, Tadahiro Ohmi, Tetsuya Goto, Takaaki Matsuoka, Toshihisa Nozawa +1 more | 2017-09-19 |
| 9378942 | Deposition method and deposition apparatus | Takehisa Saito, Shogo MASUDA | 2016-06-28 |
| 8915999 | Shower plate sintered integrally with gas release hole member and method for manufacturing the same | Masahiro Okesaku, Tadahiro Ohmi, Tetsuya Goto, Takaaki Matsuoka, Toshihisa Nozawa +1 more | 2014-12-23 |
| 8592810 | Thin film, method of forming the same, and semiconductor light-emitting element comprising the thin film | Tadahiro Ohmi, Hirokazu Asahara | 2013-11-26 |
| 8188468 | Compound-type thin film, method of forming the same, and electronic device using the same | Tadahiro Ohmi, Hirokazu Asahara, Kohei Watanuki | 2012-05-29 |
| 7923819 | Interlayer insulating film, wiring structure and electronic device and methods of manufacturing the same | Tadahiro Ohmi, Seiji Yasuda, Takaaki Matsuoka, Kohei Kawamura | 2011-04-12 |