Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340975 | Plasma processing apparatus | Yoshihiro Umezawa, Naoki Fujiwara | 2025-06-24 |
| 11832373 | Plasma processing apparatus | Yohei Yamazawa, Mayo UDA, Keigo Toyoda, Alok Ranjan, Toshiki Nakajima | 2023-11-28 |
| 11470712 | Plasma processing apparatus | Yohei Yamazawa, Mayo UDA, Keigo Toyoda, Alok Ranjan, Toshiki Nakajima | 2022-10-11 |
| 9765430 | Plasma processing apparatus and film formation method | Takenao Nemoto, Koji Yamagishi, Hiroshi Kaneko | 2017-09-19 |
| 9543191 | Wiring structure having interlayer insulating film and wiring line without a barrier layer between | Takenao Nemoto, Yugo Tomita, Hirokazu Matsumoto, Akihide Shirotori, Akinobu Teramoto +1 more | 2017-01-10 |
| 9378942 | Deposition method and deposition apparatus | Atsutoshi Inokuchi, Shogo MASUDA | 2016-06-28 |
| 9343270 | Plasma processing apparatus | Toshihisa Nozawa, Jun Yoshikawa, Michitaka Aita, Masahiro Yamazaki, Fumihiko Kaji +1 more | 2016-05-17 |