Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11832373 | Plasma processing apparatus | Yohei Yamazawa, Takehisa Saito, Mayo UDA, Alok Ranjan, Toshiki Nakajima | 2023-11-28 |
| 11562889 | Plasma processing apparatus and gas introducing method | Mayo UDA, Manabu Tsuruta | 2023-01-24 |
| 11470712 | Plasma processing apparatus | Yohei Yamazawa, Takehisa Saito, Mayo UDA, Alok Ranjan, Toshiki Nakajima | 2022-10-11 |
| 11056370 | Method for processing workpiece | Shuhei Ogawa, Yoshihide Kihara | 2021-07-06 |
| 10163607 | Temperature control method and plasma processing apparatus | Hiroshi Tsujimoto | 2018-12-25 |
| 9818582 | Plasma processing method | Hiraku MURAKAMI, Nobutaka SASAKI, Shigeru Senzaki, Takanori BANSE, Hiroshi Tsujimoto | 2017-11-14 |
| 9728418 | Etching method and etching apparatus | Masaru ISAGO, Hiroshi Tsujimoto | 2017-08-08 |