Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10553409 | Method of cleaning plasma processing apparatus | Masaru ISAGO | 2020-02-04 |
| 10264630 | Plasma processing apparatus and method for processing object | Ryoichi Yoshida, Nobutaka SASAKI | 2019-04-16 |
| 9818582 | Plasma processing method | Nobutaka SASAKI, Shigeru Senzaki, Takanori BANSE, Hiroshi Tsujimoto, Keigo Toyoda | 2017-11-14 |