Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354849 | Plasma processing apparatus | Gyeong min PARK | 2025-07-08 |
| 12308221 | Substrate processing system and method for installing edge ring | Takashi Aramaki, Lifu LI, Toshiki AKAMA, Shusei KATO, Gyeong min PARK +2 more | 2025-05-20 |
| 12261028 | Plasma processing apparatus | Shuichi Takahashi, Takaharu MIYADATE, Takaaki Kikuchi, Atsushi Ogata, Takashi Taira | 2025-03-25 |
| 12191119 | Substrate processing apparatus and gas switching method for substrate processing apparatus | — | 2025-01-07 |
| 12165893 | Substrate processing system and transfer method | Norihiko Amikura, Masatomo KITA, Toshiyuki MAKABE, Shin Matsuura, Gyeong min PARK | 2024-12-10 |
| 12165854 | Substrate support and substrate processing apparatus | Shin Matsuura, Gyeong min PARK, Toshiki AKAMA | 2024-12-10 |
| 12027346 | Substrate processing apparatus and method of driving relay member | Shin Matsuura | 2024-07-02 |
| 10264630 | Plasma processing apparatus and method for processing object | Ryoichi Yoshida, Hiraku MURAKAMI | 2019-04-16 |
| 10249478 | Substrate processing apparatus | Takashi Kitazawa, Akihiro Yoshimura | 2019-04-02 |
| 9818582 | Plasma processing method | Hiraku MURAKAMI, Shigeru Senzaki, Takanori BANSE, Hiroshi Tsujimoto, Keigo Toyoda | 2017-11-14 |
| 6233961 | Refrigerator and method of filling it with coolant | Toshio Ashida, Shinichi Nakaishi, Ikuji Ishii, Shin Furuta | 2001-05-22 |