Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12308221 | Substrate processing system and method for installing edge ring | Takashi Aramaki, Lifu LI, Nobutaka SASAKI, Shusei KATO, Gyeong min PARK +2 more | 2025-05-20 |
| 12165854 | Substrate support and substrate processing apparatus | Nobutaka SASAKI, Shin Matsuura, Gyeong min PARK | 2024-12-10 |