Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354849 | Plasma processing apparatus | Nobutaka SASAKI | 2025-07-08 |
| 12308221 | Substrate processing system and method for installing edge ring | Takashi Aramaki, Lifu LI, Nobutaka SASAKI, Toshiki AKAMA, Shusei KATO +2 more | 2025-05-20 |
| 12165854 | Substrate support and substrate processing apparatus | Nobutaka SASAKI, Shin Matsuura, Toshiki AKAMA | 2024-12-10 |
| 12165893 | Substrate processing system and transfer method | Norihiko Amikura, Masatomo KITA, Toshiyuki MAKABE, Shin Matsuura, Nobutaka SASAKI | 2024-12-10 |
| 12105964 | Storage device and method of operating the same | Jong Tack Jung | 2024-10-01 |