Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394605 | Plasma processing system and edge ring replacement method | Kenichi Kato | 2025-08-19 |
| 12374533 | Plasma processing system and method of mounting annular member | — | 2025-07-29 |
| 12165893 | Substrate processing system and transfer method | Norihiko Amikura, Masatomo KITA, Toshiyuki MAKABE, Nobutaka SASAKI, Gyeong min PARK | 2024-12-10 |
| 12165854 | Substrate support and substrate processing apparatus | Nobutaka SASAKI, Gyeong min PARK, Toshiki AKAMA | 2024-12-10 |
| 12068139 | Plasma processing apparatus | Jun Hirose | 2024-08-20 |
| 12027346 | Substrate processing apparatus and method of driving relay member | Nobutaka SASAKI | 2024-07-02 |
| 11901163 | Plasma processing system and edge ring replacement method | Kenichi Kato | 2024-02-13 |
| 11152196 | Substrate processing apparatus | — | 2021-10-19 |
| 10910251 | Pin control method and substrate processing apparatus | Masato Horiguchi | 2021-02-02 |
| 10866017 | Condensation suppressing method and processing apparatus | Takuya Nishijima | 2020-12-15 |
| 10811234 | Plasma processing apparatus and upper electrode assembly | Jun Young Chung | 2020-10-20 |
| 10777435 | Substratre delivery method and substrate processing apparatus | — | 2020-09-15 |
| 10438834 | Pin control method | Masato Horiguchi | 2019-10-08 |
| 9941101 | Plasma processing apparatus and upper electrode assembly | Jun Young Chung | 2018-04-10 |
| 9773647 | Plasma processing apparatus and upper electrode assembly | Jun Young Chung, Keita KAMBARA | 2017-09-26 |
| 9396964 | Plasma processing apparatus, plasma processing method, and non-transitory computer-readable medium | — | 2016-07-19 |
| 8173036 | Plasma processing method and apparatus | Masanobu Honda, Tetsuji Sato, Yutaka Matsui | 2012-05-08 |
| 4489067 | Lipid reducing agents | Fukuji Uenobe, Nobuhiro Yamamoto, Masakazu Shioyama | 1984-12-18 |