Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424423 | Substrate processing apparatus | Atsushi Sawachi, Jun Hirose, Ichiro SONE, Suguru Sato | 2025-09-23 |
| 12377503 | Part replacement system and part replacement device | Atsushi Sawachi, Ichiro SONE, Suguru Sato | 2025-08-05 |
| 12347660 | Substrate processing apparatus, substrate processing system, and maintenance method | Atsushi Sawachi, Jun Hirose, Ichiro SONE, Suguru Sato | 2025-07-01 |
| 12040166 | Substrate processing apparatus, substrate processing system, and maintenance method | Atsushi Sawachi, Jun Hirose, Ichiro SONE, Suguru Sato | 2024-07-16 |
| 12002666 | Measuring device, measuring method, and vacuum processing apparatus | Atsushi Sawachi, Ichiro SONE, Suguru Sato | 2024-06-04 |
| 11992912 | Part replacement system and part replacement device | Atsushi Sawachi, Ichiro SONE, Suguru Sato | 2024-05-28 |
| 10866017 | Condensation suppressing method and processing apparatus | Shin Matsuura | 2020-12-15 |
| 10534241 | Blade opening/closing apparatus and image pickup apparatus | Hideo Ohkuma | 2020-01-14 |