Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424423 | Substrate processing apparatus | Jun Hirose, Takuya Nishijima, Ichiro SONE, Suguru Sato | 2025-09-23 |
| 12377503 | Part replacement system and part replacement device | Ichiro SONE, Suguru Sato, Takuya Nishijima | 2025-08-05 |
| 12347660 | Substrate processing apparatus, substrate processing system, and maintenance method | Jun Hirose, Takuya Nishijima, Ichiro SONE, Suguru Sato | 2025-07-01 |
| 12170187 | Gas supply system, plasma processing apparatus, and gas supply method | — | 2024-12-17 |
| 12046454 | Performance calculation method and processing apparatus | Norihiko Amikura | 2024-07-23 |
| 12040166 | Substrate processing apparatus, substrate processing system, and maintenance method | Jun Hirose, Takuya Nishijima, Ichiro SONE, Suguru Sato | 2024-07-16 |
| 12033834 | Flow rate controller, gas supply system, and flow rate control method | — | 2024-07-09 |
| 12002666 | Measuring device, measuring method, and vacuum processing apparatus | Ichiro SONE, Takuya Nishijima, Suguru Sato | 2024-06-04 |
| 11992912 | Part replacement system and part replacement device | Ichiro SONE, Suguru Sato, Takuya Nishijima | 2024-05-28 |
| 11698648 | Gas supply system and gas supply method | Norihiko Amikura | 2023-07-11 |
| 11694878 | Gas supply system, plasma processing apparatus, and control method for gas supply system | — | 2023-07-04 |
| 11538665 | Gas supply system, substrate processing apparatus, and control method for gas supply system | Norihiko Amikura | 2022-12-27 |
| 11513541 | Method of inspecting and inspection apparatus | Norihiko Amikura | 2022-11-29 |
| 11217432 | Gas supply system, plasma processing apparatus, and control method for gas supply system | — | 2022-01-04 |
| 10996688 | Gas supply system and gas supply method | Norihiko Amikura | 2021-05-04 |
| 10665431 | Processing method | Kazuyuki Tezuka, Kenichi Kato, Takamichi Kikuchi, Takanori Mimura | 2020-05-26 |
| 10665430 | Gas supply system, substrate processing system and gas supply method | Norihiko Amikura, Kouji Nishino, Yohei Sawada, Yoshiharu Kishida | 2020-05-26 |
| 10607819 | Cleaning method and processing apparatus | Eiji Takahashi, Norikazu Sasaki | 2020-03-31 |
| 10533916 | Method for inspecting for leaks in gas supply system valves | Norihiko Amikura | 2020-01-14 |
| 10472717 | Gas supply system, plasma processing apparatus, and operation method for plasma processing apparatus | Norikazu Sasaki, Jun Yamashima, Yoshiyasu Sato, Kenichi Nogami | 2019-11-12 |
| 10229844 | Gas supply system, gas supply control method and gas replacement method | Norihiko Amikura, Yoshiyasu Sato | 2019-03-12 |
| 9904299 | Gas supply control method | Kumiko Ono, Hiroshi Tsujimoto, Norihiko Amikura, Norikazu Sasaki, Yoshitaka Kawaguchi | 2018-02-27 |
| 9477232 | Apparatus for dividing and supplying gas and method for dividing and supplying gas | Eiji Takahashi, Norikazu Sasaki, Yohei Sawada, Nobukazu Ikeda, Ryousuke Dohi +1 more | 2016-10-25 |