Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249515 | Etching method and etching apparatus | Shigeru Tahara, Jacques Faguet, Kaoru Maekawa, Nagisa Sato, Remi Dussart +3 more | 2025-03-11 |
| 11120999 | Plasma etching method | Koichi Yatsuda, Kaoru Maekawa, Nagisa Sato, Shigeru Tahara, Jacques Faguet +4 more | 2021-09-14 |
| 10861675 | Plasma processing apparatus and plasma processing method | Takao FUNAKUBO, Hirofumi Haga, Shinichi Kozuka, Wataru Ozawa, Akihiro Sakamoto +2 more | 2020-12-08 |
| 10480978 | Method for inspecting flow rate controller and method for processing workpiece | Hiroshi Tsujimoto | 2019-11-19 |
| 10269539 | Plasma processing method | Hiroshi Tsujimoto, Koichi Nagami | 2019-04-23 |
| 10204763 | Plasma processing apparatus and plasma processing method | Takao FUNAKUBO, Hirofumi Haga, Shinichi Kozuka, Wataru Ozawa, Akihiro Sakamoto +2 more | 2019-02-12 |
| 9960016 | Plasma processing method | Hiroshi Tsujimoto, Koichi Nagami | 2018-05-01 |
| 9904299 | Gas supply control method | Hiroshi Tsujimoto, Atsushi Sawachi, Norihiko Amikura, Norikazu Sasaki, Yoshitaka Kawaguchi | 2018-02-27 |