Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249515 | Etching method and etching apparatus | Shigeru Tahara, Jacques Faguet, Kaoru Maekawa, Kumiko Ono, Remi Dussart +3 more | 2025-03-11 |
| 11342223 | Semiconductor device manufacturing method and substrate processing apparatus | Tatsuya Yamaguchi, Syuji NOZAWA | 2022-05-24 |
| 11313836 | System, method and computer program product for gas analysis | Kazushi Yamanaka, Nobuo Takeda, Shingo Akao, Toshihiro Tsuji, Toru Oizumi +3 more | 2022-04-26 |
| 11307176 | Standard-moisture generator, system using the standard-moisture generator, method for detecting abnormality in standard-moisture and computer program product for detecting the abnormality | Yusuke Tsukahara, Osamu Hirayama, Nobuo Takeda, Toshihiro Tsuji, Kazushi Yamanaka +4 more | 2022-04-19 |
| 11258023 | Resistive change elements using passivating interface gaps and methods for making same | Mark T. Ramsbey, Thomas Rueckes, Tatsuya Yamaguchi, Syuji NOZAWA | 2022-02-22 |
| 11139313 | Method of manufacturing semiconductor memory | Sunghil Lee, Tatsuya Yamaguchi, Syuji NOZAWA | 2021-10-05 |
| 11120999 | Plasma etching method | Koichi Yatsuda, Kaoru Maekawa, Kumiko Ono, Shigeru Tahara, Jacques Faguet +4 more | 2021-09-14 |
| 11069536 | Device manufacturing method | Sunghil Lee, Tatsuya Yamaguchi, Syuji NOZAWA | 2021-07-20 |
| 10957531 | Method of manufacturing semiconductor device | Syuji NOZAWA, Tatsuya Yamaguchi | 2021-03-23 |