Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12297539 | Film forming system and film forming method | Tatsuya Yamaguchi | 2025-05-13 |
| 12104251 | Substrate processing method and substrate processing apparatus | Tatsuya Yamaguchi | 2024-10-01 |
| 12051571 | Substrate processing method and substrate processing system | Kazuya Ichiki, Tatsuya Yamaguchi | 2024-07-30 |
| 11923242 | Method of manufacturing semiconductor device | Tatsuya Yamaguchi | 2024-03-05 |
| 11843027 | Method of manufacturing semiconductor device | Tatsuya Yamaguchi | 2023-12-12 |
| 11694891 | Film forming apparatus and film forming method | Tatsuya Yamaguchi | 2023-07-04 |
| 11387139 | Method of manufacturing semiconductor device | Tatsuya Yamaguchi, Sunghil Lee | 2022-07-12 |
| 11342223 | Semiconductor device manufacturing method and substrate processing apparatus | Tatsuya Yamaguchi, Nagisa Sato | 2022-05-24 |
| 11282699 | Substrate processing apparatus | Tatsuya Yamaguchi | 2022-03-22 |
| 11258023 | Resistive change elements using passivating interface gaps and methods for making same | Mark T. Ramsbey, Thomas Rueckes, Tatsuya Yamaguchi, Nagisa Sato | 2022-02-22 |
| 11139313 | Method of manufacturing semiconductor memory | Sunghil Lee, Tatsuya Yamaguchi, Nagisa Sato | 2021-10-05 |
| 11081321 | Substrate processing apparatus | Yoji IIZUKA, Tatsuya Yamaguchi | 2021-08-03 |
| 11069536 | Device manufacturing method | Sunghil Lee, Tatsuya Yamaguchi, Nagisa Sato | 2021-07-20 |
| 10960435 | Film forming apparatus, film forming method, and storage medium | Makoto Fujikawa, Reiji Niino, Hiroyuki Hashimoto, Tatsuya Yamaguchi | 2021-03-30 |
| 10957531 | Method of manufacturing semiconductor device | Tatsuya Yamaguchi, Nagisa Sato | 2021-03-23 |
| 10790135 | Method of manufacturing semiconductor device | Tatsuya Yamaguchi, Reiji Niino, Makoto Fujikawa | 2020-09-29 |
| 10755971 | Method of manufacturing semiconductor device | Tatsuya Yamaguchi, Reiji Niino, Hiroyuki Hashimoto, Makoto Fujikawa | 2020-08-25 |
| 10629448 | Method of manufacturing semiconductor device and vacuum processing apparatus | Tatsuya Yamaguchi, Reiji Niino, Hiroyuki Hashimoto, Makoto Fujikawa | 2020-04-21 |
| 10490405 | Semiconductor device manufacturing method, substrate processing apparatus and vacuum processing apparatus | Tatsuya Yamaguchi, Reiji Niino, Hiroyuki Hashimoto, Makoto Fujikawa | 2019-11-26 |
| 10446438 | Method of manufacturing semiconductor device | Tatsuya Yamaguchi, Reiji Niino, Hiroyuki Hashimoto, Makoto Fujikawa | 2019-10-15 |
| 10096499 | Substrate processing method, program, control apparatus, film forming apparatus, and substrate processing system | Yuichi Takenaga | 2018-10-09 |
| 8580077 | Plasma processing apparatus for performing accurate end point detection | Kosuke Ogasawara, Susumu Saito | 2013-11-12 |
| 7662646 | Plasma processing method and plasma processing apparatus for performing accurate end point detection | Kosuke Ogasawara, Susumu Saito | 2010-02-16 |
| 7481944 | Etch amount detection method, etching method, and etching system | Katsuhiro Nishimaki | 2009-01-27 |