Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12051571 | Substrate processing method and substrate processing system | Tatsuya Yamaguchi, Syuji NOZAWA | 2024-07-30 |
| 10115586 | Method for depositing a planarization layer using polymerization chemical vapor deposition | Jacques Faguet, Bruce Altemus | 2018-10-30 |