Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406862 | Vacuum processing apparatus and oxidizing gas removal method | Hirokazu Ueda, Mitsuaki Iwashita, Antonio Luis Pacheco Rotondaro, Dipak Aryal, Takeo Nakano +5 more | 2025-09-02 |
| 11136668 | Film-forming apparatus and film-forming method | Tatsuya Yamaguchi, Reiji Niino | 2021-10-05 |
| 11081321 | Substrate processing apparatus | Syuji NOZAWA, Tatsuya Yamaguchi | 2021-08-03 |
| 11035041 | Film-forming apparatus and film-forming method | — | 2021-06-15 |
| 6092786 | Gate valve | Hiroki Oka, Kenichi Nakagawa, Jun Hirose, Tatsuya Nakagome, Hiroshi Koizumi +1 more | 2000-07-25 |
| 6013112 | Relay apparatus for relaying object to be treated | Teruo Asakawa | 2000-01-11 |
| 5857827 | Cassette chamber | Teruo Asakawa, Hiroaki Saeki, Keiichi Matsushima | 1999-01-12 |
| 5676757 | Decompression container | Towl Ikeda, Katsumi Ishii | 1997-10-14 |
| 5520142 | Decompression container | Towl Ikeda, Katsumi Ishii | 1996-05-28 |