Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6092786 | Gate valve | Hiroki Oka, Yoji IIZUKA, Kenichi Nakagawa, Jun Hirose, Hiroshi Koizumi +1 more | 2000-07-25 |
| 5611655 | Vacuum process apparatus and vacuum processing method | Yoshio Fukasawa, Shozo Hosoda, Takashi Tozawa, Koji Suzuki, Yasumasa Ishihara +2 more | 1997-03-18 |
| 5554249 | Magnetron plasma processing system | Makoto Hasegawa, Tsuyoshi Saito, Fumihiko Higuchi, Hideaki Amano, Katsunori Naitoh +3 more | 1996-09-10 |
| D365584 | Semiconductor manufacturing device | Takashi Tozawa | 1995-12-26 |