Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6110287 | Plasma processing method and plasma processing apparatus | Izumi Arai, Yoshifumi Tahara, Hiroshi Nishikawa, Yoshinobu MITANO, Shunichi Iimuro +2 more | 2000-08-29 |
| 5779803 | Plasma processing apparatus | Yoichi Kurono, Shigeki Tozawa | 1998-07-14 |
| 5611655 | Vacuum process apparatus and vacuum processing method | Yoshio Fukasawa, Tatsuya Nakagome, Takashi Tozawa, Koji Suzuki, Yasumasa Ishihara +2 more | 1997-03-18 |
| 5578164 | Plasma processing apparatus and method | Yoichi Kurono, Shigeki Tozawa | 1996-11-26 |
| 4782037 | Process of fabricating a semiconductor insulated circuit device having a phosphosilicate glass insulating film | Akihiro Tomozawa, Yoku Kaino, Shigeru Shimada, Nozomi Horino, Yoshiaki Yoshiura +1 more | 1988-11-01 |