Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6558506 | Etching system and etching chamber | Richard J. Freeman, Jay Wallace, Arthur Laflamme, Louise S. Barriss, Tadashi Onishi | 2003-05-06 |
| 6360762 | Method for feeding gases for use in semiconductor manufacturing | Hirofumi Kitayama, Nobukazu Ikeda, Naoya Masuda | 2002-03-26 |
| 6210482 | Apparatus for feeding gases for use in semiconductor manufacturing | Hirofumi Kitayama, Nobukazu Ikeda, Naoya Masuda | 2001-04-03 |
| 5779803 | Plasma processing apparatus | Shigeki Tozawa, Shozo Hosoda | 1998-07-14 |
| 5578164 | Plasma processing apparatus and method | Shigeki Tozawa, Shozo Hosoda | 1996-11-26 |
| 5440206 | Plasma processing apparatus comprising means for generating rotating magnetic field | Masami Kubota, Hiroyuki Yoshiki, Michio Taniguchi | 1995-08-08 |
| 5217560 | Vertical type processing apparatus | Shigeru Handa | 1993-06-08 |