Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5843236 | Plasma processing apparatus for radiating microwave from rectangular waveguide through long slot to plasma chamber | Kazuki Kondo, Akira Ishii, Shigeki Amadatsu, Tatsuya Saijo, Koji Itadani +1 more | 1998-12-01 |
| 5440206 | Plasma processing apparatus comprising means for generating rotating magnetic field | Yoichi Kurono, Masami Kubota, Michio Taniguchi | 1995-08-08 |