SA

Shigeki Amadatsu

DA Daihen: 9 patents #18 of 305Top 6%
Overall (All Time): #564,083 of 4,157,543Top 15%
9
Patents All Time

Issued Patents All Time

Showing 1–9 of 9 patents

Patent #TitleCo-InventorsDate
10755898 Plasma generating device Hayato Notomi, Eiji Tatebe 2020-08-25
10306744 Plasma generation apparatus and high-frequency power source Hayato Notomi, Eiji Tatebe, Michio Taniguchi 2019-05-28
10014162 Plasma generation apparatus for generating toroidal plasma Michio Taniguchi 2018-07-03
8710824 Voltage detector having voltage detection printed board Yoshifumi Ibuki, Tomohiko Kitano, Shuji Omae 2014-04-29
7714594 Current detection printed board, voltage detection printed board, and current/voltage detector using same, and current detector and voltage detector Yoshifumi Ibuki, Tomohiko Kitano, Shuji Omae 2010-05-11
7489145 Plasma processing system Hiroshi Matoba, Ryohei Tanaka, Shuji Omae 2009-02-10
6726803 Multi-sectional plasma generator with discharge gaps between multiple elements forming a plasma discharge cavity Kazuki Kondo, Michio Taniguchi, Shoichiro Minomo 2004-04-27
6401653 Microwave plasma generator Michio Taniguchi, Shoichiro Minomo, Kazuki Kondo 2002-06-11
5843236 Plasma processing apparatus for radiating microwave from rectangular waveguide through long slot to plasma chamber Hiroyuki Yoshiki, Kazuki Kondo, Akira Ishii, Tatsuya Saijo, Koji Itadani +1 more 1998-12-01